000 00302nam a2200109Ia 4500
008 171211s9999 xx 000 0 und d
245 _aReactive Sputter Deposition
245 _cDiederik Depla and Stijn Mahieu
260 _c2015
650 _xSCIENCE
856 _uhttp://down.ebook777.com/ReaSpuDep.pdf
999 _c349660
_d349660